Crystallographic Orientation (Miscut):: +/-3°
Lateral Dimensions Measured: to smaller side
Edges: Laser Cut
Edge Features: < 0.2 mm
Edge Orientation: <100> edges
Face Orientation: {100} faces
Laser Kerf: 3°
Side 1, Roughness, Ra: polished, Ra < 30 nm
Side 2, Roughness, Ra: lapped, Ra < 250 nm
Lateral Tolerance: +0.2/-0 mm
Thickness Tolerance: +/- 0.05 mm
Boron Concentration [B]: 1-30 ppm
Nitrogen Concentration [N]: <800 ppb