Crystallographic Orientation (Miscut): +/-3°
Lateral Dimensions Measured: to smaller side
Edges: Laser Cut
Edge Features: < 0.2 mm
Edge Orientation: <100> edges
Face Orientation: {100} faces
Laser Kerf: 3°
Lateral Tolerance: +0.2/-0 mm
Side 1, Roughness, Ra: polished, Ra < 30 nm on {100} face
Side 2, Roughness, Ra: polished, Ra < 30 nm on {100} face
Thickness Tolerance: +0.2/-0 mm
Thickness Dimension: 1.2 mm
Boron Concentration [B]: <800 ppb
Nitrogen Concentration [N]: <800 ppb